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Next: 2.2.1 Device Simulation Up: 2. Technology Computer Aided Previous: 2.1.4 Pseudo Process Models

2.2 Electrical Modeling

Based on the structural description of a semiconductor device which was produced by a process model, device simulation tools are modeling the electrical properties of these devices. Device simulators act as substitutes for probing hardware as it is available at fabrication sites. They close the gap between the model of a fabrication process and the electrical characteristics of its resulting devices in which a process design engineer is finally interested.

In conjunction with the wafer model produced by process simulation, these device simulation tools form a fully functional device model exhibiting the same electrical characteristics as the corresponding real device on the wafer. In this sense, process simulation together with device simulation provide a full functional model of an IC fabrication technology as depicted in Figure 2.4.
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...logy defined by the process recipe and a
set of lithography masks.}

Rudi Strasser