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2.1 Process Modeling

Topography processing, ion implantation, and thermal processing steps are the dominant steps which are involved in the production of an integrated circuit. Elaborate TCAD simulation tools are available which are able to model them. Some of these simulation tools are focused on isolated fabrication steps and others are able to model a complete fabrication process. Using these simulation tools one can more or less build up models for a complete fabrication process. This process model is used to derive device descriptions which are the basis for further electrical analyses as it will be described in Section 2.2.

Rudi Strasser