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2. Technology Computer Aided Design

TCAD has become an attractive alternative to full wafer flows in the fabrication facility. The services of TCAD are utilized in order to reduce the development costs of a fabrication technology by substituting simulations for split run experiments. Moreover, TCAD offers detailed insight into the operation of microelectronic devices, which would be extremely difficult to achieve otherwise. As shown in Figure 2.1, TCAD as a discipline can be divided into a couple of areas that are occupied either by process development engineers, or by TCAD-support engineers. This chapter will outline the scope of existing tools for various TCAD tasks. Moreover, the methodologies of their usage are sketched.
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Technology CAD disciplines.}

Rudi Strasser