List of Acronyms

1D, 2D, 3D

one-, two-, and three-dimensional

Al

aluminium

ALD

atomic layer deposition

AFM

atomic force microscopy

B

boron

C

carbon

CrN

chronium nitride

CVD

chemical vapor deposition

ECD

electrochemical deposition

FA

furnace annealing

GaAs

gallium arsenide

GaN

gallium nitride

Ge

germanium

H2O

dihydrogen oxide (water)

IGBT

insulated-gate bipolar transistors

JFET

junction-gate field-effect transistors

LAMMPS

large-scale atomic/molecular massively parallel simulator

LED

light emitting diode

MBE

molecular beam epitaxy

MD

molecular dynamics

MESFET

metal-semiconductor field-effect transistor

MOSFET

metal-oxide-semiconductor field-effect transistor

N

nitrogen

NO

nitric oxide

O

oxygen (element)

O2

oxygen (molecule)

P

phosphorus

PVD

physical vapor deposition

RBS

Rutherford backscattering spectrometry

ReaxFF

reactive force-field

RTA

rapid thermal annealing

SBD

Schottky barrier diode

Si

silicon

SiC

silicon carbide

Si2C

disilicon carbide

SiC2

silicon dicarbide

SiO2

silicon dioxide

TCAD

technology computer-aided design

TEM

transmission electron microscopy

Ti

titanium

TiAlN

titanium aluminium nitride

TiN

titanium nitride

QM

quantum mechanics

VSC-3

Vienna Scientific Cluster 3

W

tungsten

ZrN

zirconium nitride