7.4 Discussion of the Experimental Output

Before the previously described extraction routine is applied on the experimental output of various oxide thicknesses, the origin of the curvature is described schematically for the 1.8nm  thick oxides first. On the basis of Fig. 7.5 each relaxation curve apparently contains two contributions, one depending on the stress time tstr   and one depending on the oxide electric field Eox   .

  7.4.1 Stress Time Component
  7.4.2 Oxide Electric Field Component