7.5 Short-Term and Long-Term Relaxation

As illustrated in Fig. 7.7 the initial relaxation rate b1   after NBTI stress is higher than its PBTI counterpart. For NBTI b
 1   increases with increasing E
 ox   , while for PBTI b1   only slightly increases with increasing Eox   . Due to also higher ΔVTH,0   at the beginning of the relaxation with higher Eox   , the effect even results in lower relative recovery per decade with higher Eox   . Furthermore, for PBTI b1   decreases with increasing tstr   because of the higher contributing permanent part.


PIC


Figure 7.7: The slopes of the first (b1   ) and second (b2   ) logarithm are plotted over tstr   as a function of the device thickness tox   and its oxide electric field Eox   . The slope b1   of NBTI stress is higher than that resulting from PBTI stress, and decreases with tstr   as shown by the solid lines. The dashed line denotes the boundary between NBTI and PBTI. The initial relaxation slopes b
 1   increase from 0.196  (PBTI) to 4.35  (NBTI), which is a factor of more than 20  . This demonstrates the different initial relaxation behavior following NBTI and PBTI stress.


In contrast, the long-term relaxation b2   increases with tstr   and Eox   , which clearly shows enhanced relaxation after PBTI stress, but lower relaxation after NBTI compared to the corresponding b1   , cf. Fig. 7.8. All these results support the trends schematically shown in Fig. 7.4.


PIC


Figure 7.8: The slopes of the first (b1   ) and second (b2   ) logarithm are plotted over tstr   as a function of the device thickness tox   and its oxide electric field Eox   . The slope b2   for the long-term characteristics increases with tstr   and Eox   and clearly reflects the increased relaxation after PBTI stress with values ranging from 0.53  (NBTI) to 5.99  (PBTI). Combining this fact and recalling that PBTI does practically not recover during the first few seconds supports the assumption that the performed kind of stress condition already constitutes the short-term and long-term relaxation.


  7.5.1 Entire Relaxation
  7.5.2 Change in ΔVTH