As illustrated in Fig. 7.7 the initial relaxation rate
after NBTI stress is
higher than its PBTI counterpart. For NBTI
increases with increasing
,
while for PBTI
only slightly increases with increasing
. Due to also
higher
at the beginning of the relaxation with higher
, the effect
even results in lower relative recovery per decade with higher
. Furthermore,
for PBTI
decreases with increasing
because of the higher contributing
permanent part.

) and second (
) logarithm are
plotted over
as a function of the device thickness
and its oxide
electric field
. The slope
of NBTI stress is higher than that resulting
from PBTI stress, and decreases with
as shown by the solid lines. The
dashed line denotes the boundary between NBTI and PBTI. The initial
relaxation slopes
increase from
(PBTI) to
(NBTI), which is
a factor of more than
. This demonstrates the different initial relaxation
behavior following NBTI and PBTI stress.
In contrast, the long-term relaxation
increases with
and
, which
clearly shows enhanced relaxation after PBTI stress, but lower relaxation after
NBTI compared to the corresponding
, cf. Fig. 7.8. All these results support
the trends schematically shown in Fig. 7.4.

) and second (
) logarithm are
plotted over
as a function of the device thickness
and its oxide
electric field
. The slope
for the long-term characteristics increases
with
and
and clearly reflects the increased relaxation after PBTI
stress with values ranging from
(NBTI) to
(PBTI). Combining
this fact and recalling that PBTI does practically not recover during the
first few seconds supports the assumption that the performed kind of stress
condition already constitutes the short-term and long-term relaxation.