7.4.2 Oxide Electric Field Component

To be able to discuss the effect of Eox   on the relaxation we again refer to Fig. 7.5. When comparing the devices stressed for 1ks  with 6MV ∕cm  and 8MV  ∕cm  , τA   has approximately the same value, but the relative relaxation with respect to its very different ΔVTH,0   changes as depicted in Fig. 7.4 (bottom left). With a raise in the oxide electric field the recovery sets in late, but proceeds faster. This effect is now explored by specifying the slopes of the first (b1   ) and second (b2   ) logarithm, i.e. the short-term and long-term relaxation behavior.