2. Three-Dimensional
Device Simulation

The demands on state-of-the-art device simulators are high and the development of a three-dimensional device simulator is a challenging task. Within this thesis, the device simulator Minimos-NT has been extended to a multi-dimensional device simulator (see Chapter 3) to allow both two- and three-dimensional simulations. Moreover, for the controlling of such a complex simulator, a control system mandatory for state-of-the-art TCAD simulators has been developed and applied (see Chapter 3), and several investigations on three-dimensional effects have been performed (see Chapter 4).

Robert Klima 2003-02-06