6.5  Residual Stress Estimation

The stress in a single droplet does not characterize the stress of the entire film. Each droplet coalesces with a different size along the metal, which leads to different stress magnitudes in each droplet. In this work a statistical approach is presented to obtain the average stress along the film. Furthermore, the impact of process parameters is included in the final estimation.

6.5.1 One-Dimensional Volmer-Weber Growth Simulation
6.5.2 Coalescence Simulation
6.5.3 Stress Estimate
6.5.4 Summary and Conclusion