2.1 Measurement-Stress-Measurement

The probably most widespread measurement technique when investigating BTI issues is the so-called Measurement-Stress-Measurement (MSM) method. In the most simple way the transistor is first characterized through static ID(VG )  -measurements to obtain a reference of the threshold voltage. (Other ways to extract the onset of the threshold region are listed in [16].) Then VG   is set to Vstr   for some specified time, referred to as the stress time tstr   . After the end of stress the device is once again characterized and the amount of degradation is estimated by the difference with respect to the initial characteristic. The MSM-method can be performed by either monitoring I
 D   and a subsequent conversion into a VTH   -shift or by directly monitoring VTH   .

  2.1.1 Monitoring ID   at VTH
  2.1.2 Direct Monitoring of VTH
  2.1.3 Extended-Measurement-Stress-Measurement Setup