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B. Analytical Fourier Transformations
In this appendix we derive analytical expressions
for the Fourier coefficients of the elementary geometrical patterns
that result from the decomposition of the photomask
as described in Section 4.4.1. Following (4.105),
we have to evaluate integrals like
for the elementary triangular- and rectangular-shaped patterns.
Additionally, the stability of the numerical evaluation of the derived
formulae is investigated.
Heinrich Kirchauer, Institute for Microelectronics, TU Vienna