This chapter gives a brief introduction to digital CMOS integrated circuits and devices to illustrate some of the basic terms and concepts used in this thesis. The presentation of the material is confined to selected topics and is not meant to stand for a complete course on VLSI technology. Supplementary information on VLSI systems and techniques can be found in standard text book literature such as, e.g., [5,87,26,68,67,86] (digital VLSI circuits and systems), [90,79,2,81,11,89] (semiconductor device physics), and [78,89,88,66,24,10] (process technology).