Publications

50.

L.F. Aguinsky; G. Wachter; R. Rodrigues; A. Scharinger, A. Toifl, M Trupke, U. Schmid; A. Hössinger

Feature-Scale Modeling of Low-Bias SF6 Plasma Etching of Si Inproceedings

2021 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EuroSOI-ULIS), pp. 1-4, IEEE Explore, 2021.

Links | BibTeX | Tags: Level-Set Method, Plasma Etching, process TCAD, Ray Tracing, SF6 plasma

49.

L.F. Aguinsky; G. Wachter; P. Manstetten; F. Rodrigues; M. Trupke; A. Hössinger; J. Weinbub

Modeling and analysis of sulfur hexafluoride plasma etching for silicon microcavity resonators Journal Article

Journal of Micromechanics and Microengineering, 31 (12), pp. 125003, 2021.

Links | BibTeX | Tags: level-set, microcavity resonators, Plasma Etching, Ray Tracing, topography simulations

48.

C. Lenz, A. Toifl, A. Hössinger, J. Weinbub

Curvature-Based Feature Detection for Hierarchical Grid Refinement in Epitaxial Growth Simulations Presentation

01.09.2021, (EUROSOI-ULIS'2021, Caen, France ).

Links | BibTeX | Tags: curvature, hierarchical gird, Level-Set Method, Nonimaging Applications, topography simulation

47.

C. Lenz, A. Toifl, A. Hössinger, J. Weinbub

Curvature Based Feature Detection for Hierarchical Grid Refinement in TCAD Topography Simulations Inproceedings

2021 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EuroSOI-ULIS), pp. 1-4, IEEE Explore, 2021.

Links | BibTeX | Tags: curvature, hierarchical gird, Level-Set Method, Non-planar epitaxial growth, TCAD, topography simulation

46.

M. Quell, V. Suvorov, A. Hössinger, J. Weinbub

Parallel Velocity Extension for Level-Set-Based Material Flow on Hierarchical Meshes in Process TCAD Journal Article

IEEE Transactions on Electron Devices , 68 (11), pp. 5430-5437, 2021.

Links | BibTeX | Tags: Hierarchical meshes, Level-Set Method, material flow process, Parallel Algorithm, process TCAD, shared-memory, thermal oxidation, Velocity Extension

45.

C. Lenz, A. Scharinger, M. Quell, P. Manstetten, A. Hössinger, J. Weinbub

Evaluating Parallel Feature Detection Methods for Implicit Surfaces Inproceedings

2021 Book of Abstracts of the Austrian-Slovenian HPC Meeting (ASHPC), pp. 31, Austrian-Slovenian HPC Meeting (ASHPC) IEEE Explore, 2021, ISBN: 978-961-6980-77-7.

Links | BibTeX | Tags: parallel computing, Shared-memory parallelization

44.

A. Toifl, F. Rodrigues, L. F. Aguinsky, A. Hössinger; J. Weinbub

Continuum Level-set Model for Anisotropic Wet Etching of Patterned Sapphire Substrates Journal Article

Semiconductor Science and Technology, 36 (4), pp. 045016, 2021.

Links | BibTeX | Tags: Continuum modeling of etching processes, Crystallographic anisotropy, Crystallographic etching, Level-Set Method, Patterned sapphire substrates

43.

M. Quell, G. Diamantopoulos, A. Hössinger, J. Weinbub

Shared-Memory Block-Based Fast Marching Method for Hierarchical Meshes Journal Article

Journal of Computational and Applied Mathematics, 392 , pp. 113488-1 - 113488-15, 2021.

Links | BibTeX | Tags: Eikonal equation, fast marching method, Hierarchical meshes, Level-Set Method, Redistancing, Shared-memory parallelization

42.

A. Toifl

Physical Process TCAD: Victory Process´ Crystal Anisotropy Engine Presentation

20.10.2020, ((SURGE (Silvaco UseRs Global Event), Santa Clara, CA, USA - virtual -Invited)).

BibTeX | Tags: Crystallographic etching, Level-Set Method, Non-planar epitaxial growth

41.

A. Scharinger, P. Manstetten, A. Hössinger, J. Weinbub

Generative Model Based Adaptive Importance Sampling for Flux Calculations in Process TCAD Inproceedings

Proceedings of the International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), pp. 39-42, 2020.

Links | BibTeX | Tags: 3D simulations, Flux Calculation, Monte Carlo importance sampling, particle transport

40.

M. Quell, G. Diamantopoulos, A. Hössinger, S. Selberherr, J. Weinbub

Parallel Correction for Hierarchical Re-Distancing Using the Fast Marching Method Inproceedings

Advances in High Performance Computing, Studies in Computational Intelligence, pp. 438-451, Springer International Publishing, 2020, ISBN: 978-3-030-55347-0.

Links | BibTeX | Tags: fast marching method, parallel computing, topography simulation

39.

A. Toifl, M. Quell, X. Klemenschits, P. Manstetten, A. Hössinger, S. Selberherr, J. Weinbub

The Level-Set Method for Multi-Material Wet Etching and Non-Planar Selective Epitaxy Journal Article

IEEE Access, 8 , pp. 115406-115422, 2020.

Links | BibTeX | Tags: Crystallographic etching, Level-Set Method, Multi-material Simulation, Non-Convex Hamiltonian, Non-planar epitaxial growth

38.

M. Quell, G. Diamantopoulos, A. Hössinger, J. Weinbub

Shared-Memory Block-Based Fast Marching Method for Hierarchical Meshes Inproceedings

Talk: European Seminar on Computing (ESCO), pp. 1, Pilsen, Czech Republic, 2020.

Links | BibTeX | Tags: fast marching method, parallel computing, Talk

37.

M. Quell, P. Manstetten, A. Hössinger, S. Selberherr, J. Weinbub

Parallelized Construction of Extension Velocities for the Level-Set Method Incollection

Parallel Processing and Applied Mathematics, pp. 548 - 552, Lecture Notes in Computer Science, Parallelized Construction of Extension Velocities for the Level-Set Method, 2020, ISBN: 978-3-030-43229-4.

Links | BibTeX | Tags: fast marching method, Level-Set Method, parallel computing, Velocity Extension

36.

C. Lenz, A. Scharinger, A. Hössinger, J. Weinbub

A Novel Surface Mesh Coarsening Method for Flux-Dependent Topography Simulations of Semiconductor Fabrication Processes Inproceedings

Talk: International Conferences on Scientific Computing in Electrical Engineering (SCEE), pp. 99-100, Eindhoven, The Netherlands, 2020.

Links | BibTeX | Tags: Meshing, Monte Carlo estimates, TCAD, topography simulation

35.

M. Quell, G. Diamantopoulos, A. Hössinger, S. Selberherr, J. Weinbub

Parallelized Bottom-Up Correction in Hierarchical Re-Distancing for Topography Simulation Inproceedings

Proceedings of the High Performance Computing Conference, pp. 45, 2019.

Links | BibTeX | Tags: Parallel Algorithm, topography simulation

34.

M. Quell, A. Toifl, A. Hössinger, S. Selberherr, J. Weinbub

Parallelized Level-Set Velocity Extension Algorithm for Nanopatterning Applications Inproceedings

Proceedings of the International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), pp. 335 - 338, 2019, ISBN: 978-1-7281-0938-1.

Links | BibTeX | Tags: FMM implementation, Nanopatterning, Talk

33.

A. Toifl, M. Quell, A. Hössinger, A. Babayan, S. Selberherr, J. Weinbub

Novel Numerical Dissipation Scheme for Level-Set Based Anisotropic Etching Simulations Inproceedings

Proceedings of the International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), pp. 327 - 330, 2019, ISBN: ISBN: 978-1-7281-0938-1.

Links | BibTeX | Tags: Anisotropic Etching, crystallography, Talk

32.

J. Weinbub; M. Nedjalkov

Computational Strategies for Two-Dimensional Wigner Monte Carlo Inproceedings

Proceedings of the High Performance Computing Conference (HPC), pp. 55-56, 2019, (invited).

Links | BibTeX | Tags: Computational Strategies, invited, Parallel Algorithm, Wigner Monte Carlo

31.

M. Quell, P. Manstetten, A. Hössinger, S. Selberherr, J. Weinbub

Parallelized Construction of Extension Velocities for the Level-Set Method Inproceedings

Proceedings of the International Conference on Parallel Processing and Applied Mathematics (PPAM), pp. 42, 2019.

Links | BibTeX | Tags: Level-Set Method, Parallel Algorithm, Velocity Extension

30.

L. F. Aguinsky, P. Manstetten, A. Hössinger, S. Selberherr, J. Weinbub

An Extended Knudsen Diffusion Model for Aspect Ratio Dependent Atomic Layer Etching Inproceedings

Abstracts of the International Conference on Atomic Layer Deposition (ALD), 2019.

Links | BibTeX | Tags: Atomic Layer Etching, Knudsen diffusion

29.

L. Gnam, P. Manstetten, M. Quell, K. Rupp, S. Selberherr, J. Weinbub

A Flexible Shared-Memory Parallel Mesh Adaptation Framework Inproceedings

Proceedings of the International Conference on Computational Science and Its Applications (ICCSA), pp. 158–165, 2019, ISBN: 978-1-7281-2847-4.

Links | BibTeX | Tags: flexibl mesh adaptation, parallel meshing, shared-memory, unstructured meshes

28.

J. Woerle, V. Simonka, E. Müller, A. Hössinger, H. Sigg, S. Selberherr, J. Weinbub, M. Camarda, U. Grossner

Surface Morphology of 4H-SiC After Thermal Oxidation Journal Article

Materials Science Forum, 963 , pp. 180-183, 2019.

Links | BibTeX | Tags: AFM, Interface, Macrosteps, Oxidation Rate, Surface Morphology, Transmission Electron Microscopy (TEM)

27.

J. Weinbub , M. Ballicchia; M. Nedjalkov

Electron Interference in Single- and Double-Dopant Potential Structures Inproceedings

Proceedings of the International Conference on Large-Scale Scientific Computations (LSSC), pp. 103–104, 2019.

Links | BibTeX | Tags: dopant activation, double dopant, signed particle approach, Wigner functions

26.

A. Toifl, V. Simonka, A. Hössinger, S. Selberherr, T. Grasser, J. Weinbub

Simulation of the Effects of Postimplantation Annealing on Silicon Carbide DMOSFET Characteristics Journal Article

IEEE Transactions on Electron Devices , 66 , pp. 3060 - 3065 , 2019, ISSN: 1557-9646 .

Links | BibTeX | Tags: Annealing, DMOSFET, Electrical Activation, implantation, silicon carbide

25.

A. Hössinger, P. Manstetten, G. Diamantopoulos, M. Quell, J. Weinbub

High Performance Computing Aspects in Semiconductor Process Simulation Inproceedings

Book of Abstracts of the Workshop on High Performance TCAD (WHPTCAD), pp. 3-4, 2019, (invited).

Links | BibTeX | Tags: Etching Simulation, invited, Process Simulation

24.

L. F. Aguinsky, P. Manstetten, A. Hössinger, S. Selberherr, J. Weinbub

Three-Dimensional TCAD for Atomic Layer Processing Inproceedings

Book of Abstracts of the Workshop on High Performance TCAD, 2019.

Links | BibTeX | Tags: ALD, ALD processes, ALE, MC approach

23.

P. Manstetten, L. F. Aguinsky, S. Selberherr, J. Weinbub

High-Performance Ray Tracing for Nonimaging Applications Inproceedings

Book of Abstracts of the Workshop on High Performance TCAD (WHPTCAD), pp. 20, 2019.

Links | BibTeX | Tags: Nonimaging Applications, Ray Tracing

22.

P. Manstetten, G. Diamantopoulos, L. Gnam, L.F. Aguinsky, M. Quell, A. Toifl, A. Scharinger, A. Hössinger, M. Ballicchia, M. Nedjalkov, J. Weinbub

High Performance TCAD: From Simulating Fabrication Processes to Wigner Quantum Transport Inproceedings

Book of Abstracts of the Workshop on High Performance TCAD (WHPTCAD), pp. 13, 2019.

Links | BibTeX | Tags: Simulating Fabrication Process, TCAD, Wigner functions

21.

L. F. Aguinsky, P. Manstetten, A. Hössinger, S. Selberherr, J. Weinbub

A Mathematical Extension to Knudsen Diffusion Including Direct Flux and Accurate Geometric Description Inproceedings

Book of Abstracts of the 20th International Workshop on Computational Nanotechnology, 2019, ISBN: ISBN 978-3-9504738-0-3.

Links | BibTeX | Tags: Knudsen diffusion, Radiosity

20.

M. Ballicchia; M. Nedjalkov; J. Weinbub

Effects of Repulsive Dopants on Quantum Transport in a Nanowire Inproceedings

Book of Abstracts of the International Workshop on Computational Nanotechnology (IWCN), pp. 115–116, 2019, ISBN: 978-3-9504738-0-3.

Links | BibTeX | Tags: dopant activation, nanowire, quantum transport

19.

M. Ballicchia, D K Ferry, M. Nedjalkov, J. Weinbub

Linking Wigner Function Negativity to Quantum Coherence in a Nanowire Inproceedings

Book of Abstracts of the International Workshop on Computational Nanotechnology (IWCN), pp. 59–60, 2019, ISBN: 978-3-9504738-0-3.

Links | BibTeX | Tags: Quantum computing, Wigner functions

18.

R. Kosik, M. Thesberg , J. Weinbub; H.Kosina

On the Consistency of the Stationary Wigner Equation Inproceedings

Book of Abstracts of the International Wigner Workshop (IW2), pp. 30–31, 2019, ISBN: 978-3-9504738-1-0.

Links | BibTeX | Tags: Quantum computing, quantum transport, Wigner functions

17.

M. Ballicchia; M. Nedjalkov; J. Weinbub

Electron Evolution and Boundary Conditions in the Wigner Signed-Particle Approach Inproceedings

Book of Abstracts of the International Wigner Workshop (IW2), pp. 24–25, 2019, ISBN: 978-3-9504738-1-0.

Links | BibTeX | Tags: Signed-Particle Approach, Wigner functions

16.

J. Weinbub, M. Ballicchia, D K Ferry; M. Nedjalkov

Electron Interference and Wigner Function Negativity in Dopant Potential Structures Inproceedings

Book of Abstracts of the International Wigner Workshop (IW2), pp. 14–15, 2019, ISBN: 978-3-9504738-1-0.

Links | BibTeX | Tags: Electron Interface, Quantum computing, Wigner functions

15.

G. Diamantopoulos, A. Hössinger, S. Selberherr, J. Weinbub

A Shared Memory Parallel Multi-Mesh Fast Marching Method for Re-Distancing Journal Article

Advances in Computational Mathematics, (10444), pp. 1-17, 2019, ISSN: 1572-9044.

Links | BibTeX | Tags: FMM, Mesh, Parallel Algorithm

14.

G. Diamantopoulos, P. Manstetten, L. Gnam, V. Simonka, L.F. Aguinsky, M. Quell, A. Toifl, A. Hössinger, J. Weinbub

Recent Advances in High Performance Process TCAD Inproceedings

Abstracts SIAM Computational Science and Engineering, pp. 335, 2019.

Links | BibTeX | Tags: 3D simulations, Flux Calculation, particle transport

13.

L. Gnam, P. Manstetten, A. Hössinger, S. Selberherr; J. Weinbub

Accelerating Flux Calculations Using Sparse Sampling Incollection

L. Filipovic; T. Grasser (Ed.): Miniaturized Transistors, pp. 176–192, MDPI, 2019, ISBN: 978-3-03921-010-7, (invited).

Links | BibTeX | Tags: Etching Simulation, Flux Calculation, invited, Process Simulation, topography simulation

12.

L. Gnam; S. Selberherr; J. Weinbub

Evaluation of Serial and Parallel Shared-Memory Distance-1 Graph Coloring Algorithms Incollection

G. Nikolov; N. T. Kolkovska; K. Georgiev (Ed.): Lecture Notes in Computer Science, 11189 , pp. 106-114, Springer, 2019, ISBN: 978-3-030-10692-8.

Links | BibTeX | Tags: Distance-1 coloring, Graph coloring, Parallel Algorithm, shared-memory

11.

A. Toifl, V. Simonka, A. Hössinger, S. Selberherr, J. Weinbub

Steady-State Empirical Model for Electrical Activation of Silicon-Implanted Gallium Nitride Inproceedings

Proceedings of the International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), pp. 336-339, 2018, ISBN: 978-1-5386-6788-0.

Links | BibTeX | Tags: Annealing, Electrical Activation, gallium nitride, modeling, power devices

10.

J. Weinbub, M. Ballicchia, M. Nedjalkov

Electron Interference in a Double-Dopant Potential Structure Inproceedings

Abstracts Workshop on Innovative Devices and Systems (WINDS), 2018, ISBN: 978-3-901578-32-8, 52 - 53.

Links | BibTeX | Tags: dopant activation, Electron Interface

9.

L. Gnam, P. Manstetten, A. Hössinger, S. Selberherr, J. Weinbub

Accelerating Flux Calculations Using Sparse Sampling Journal Article

Micromachines, 9 , 2018, (invited).

Links | BibTeX | Tags: Etching Simulation, Flux Calculation, invited, Process Simulation, topology simulation

8.

J. Weinbub, D.K. Ferry

Recent Advances in Wigner Function Approaches Journal Article

Applied Physics Reviews , (5), 2018, (invited).

Links | BibTeX | Tags: invited, Phase space methods, Quantum chemistry, Quantum computing, Quantum effects, Quantum electronics, Quantum information, Quantum mechanical systems and processes, Quantum optics, Signal processing, Wigner, Wigner functions

7.

P. Manstetten

Performance Improvements For Advanced Physical Etching And Deposition In Memory Technologies Presentation

09.10.2018, (SURGE (Silvaco UseRs Global Event), Santa Clara, CA, USA - Invited ).

BibTeX | Tags: invited, memory technologies, Plasma Etching

6.

V. Simonka

Advancements In Annealing And Oxidation Steps For Compound Semiconductor Power Devices Presentation

09.10.2018, (SURGE (Silvaco UseRs Global Event), Santa Clara, CA, USA - Invited).

BibTeX | Tags: Annealing, Oxidation, power devices

5.

L. Gnam, S. Selberherr, J. Weinbub

Evaluation of Serial and Parallel Shared-Memory Distance-1 Graph Coloring Algorithms Inproceedings

L. Gnam (Ed.): Book of Abstracts of the Ninth International Conference on Numerical Methods and Applications (NM&A'18), 2018.

Links | BibTeX | Tags: Parallel Algorithm

4.

V. Simonka, A. Hössinger, S. Selberherr, J. Weinbub

Investigation of Post-Implantation Annealing for Phosphorus-Implanted 4H-Silicon Carbide Inproceedings

Proceedings of the International Conference on Microelectronic Devices and Technologies (MicDAT), pp. 42-44, International Frequency Sensor Association (IFSA) Publishing, S.L., Barcelona, Spain, 2018.

Links | BibTeX | Tags: Annealing, implantation, modeling, phosphorus, silicon carbide, transient

3.

V. Simonka, A. Toifl, A. Hössinger, S. Selberherr, J. Weinbub

Transient Model for Electrical Activation of Aluminium and Phosphorus-Implanted Silicon Carbide Journal Article

Journal of Applied Physics, 123 (23), 2018.

Links | BibTeX | Tags: Annealing, carbides, dopping

2.

P. Manstetten; L. Gnam; A. Hössinger; S. Selberherr; J. Weinbub

Sparse Surface Speed Evaluation on a Dynamic Three-Dimensional Surface Using an Iterative Partitioning Scheme Incollection

Lecture Notes in Computer Science, ICCS 2018 , pp. 694-707, Springer, 2018, ISBN: 978-3-319-93698-7.

Links | BibTeX | Tags: HPC, topography simulation

1.

G. Diamantopoulos, A. Hössinger, S. Selberherr, J. Weinbub

A Shared-Memory Parallel Multi-Mesh Fast Marching Method for Full and Narrow Band Re-Distancing Inproceedings

Talk: European Seminar on Computing (ESCO), pp. 1, Proc. 6th European Seminar on Computing, Pilsen, Czech Republic, 2018.

Links | BibTeX | Tags: Parallel Algorithm