5. Applications

``A little inaccuracy sometimes saves tons of explanation.''

Hector Hugh Munro5.1

THIS chapter presents typical applications for optimization in TCAD. Since the field of TCAD includes a wide range of applications, this chapter will present a subset of optimization to show the difficulties of these examples and their solutions. The first part of this chapter presents the calibration of certain model for deposition of $ \mathrm{SiO_2}$ using a LPCVD process. The second part deals with the extraction of thermal coefficient for the electrical and thermal conductivity. The third part presents some examples where the information obtain from the first two examples are applied in order to provide accurate material models for more advanced structures.


Stefan Holzer 2007-11-19