4.2 Discretization of the Model Equations

In this section the discretization of the equations to be solved during electromigration simulation is presented. The corresponding set of equations is summarized in Section 3.6.

- 4.2.1 Discretization of Laplace's Equation
- 4.2.2 Discretization of the Thermal Equation
- 4.2.3 Discretization of the Vacancy Balance Equation
- 4.2.4 Discretization of the Mechanical Equations

R. L. de Orio: Electromigration Modeling and Simulation