4. Process Simulation Applications

In the following sections applications of the WAFER-STATE-SERVER are given. The three three-dimensional process simulators -- Monte-Carlo Ion Implantation simulator (MCIMPL), diffusion and oxidation simulator (FEDOS), and the etching and deposition simulator (ETCH3D) are presented. These simulators are fully integrated with the WAFER-STATE-SERVER and take advantage of the described functionality.