5.6 Examples

In this section three examples of optimization tasks are given. First, a comparison of the presented local and global optimization strategies is presented. A sample task -- the inverse modeling of the doping concentration of a MOS transistor -- was performed with three of the available optimizers.

In the second example a combination of the local, gradient based optimizer with the global very fast simulated re-annealing algorithm will be shown.

Finally, an industrial application, the automated calibration of parameters of the process simulator TSUPREM-IV to experimental data is presented. In the example a model to simulate cluster formation and dissolution in Silicon is calibrated.