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3.3 Monte-Carlo Method

The Monte-Carlo ion implantation simulation method, is a physically based approach in contrast to the analytical method, because the interaction of the implanted particles with the target is simulated on an atomic scale. The trajectories of many implanted particles are calculated until they come to rest due to collisions with nuclei and electrons of the target.

Subsections

3.3.1 Energy Loss Mechanisms
3.3.2 Nuclear Stopping Process
- 3.3.2.1 Interatomic Screening Potential
- 3.3.2.2 Average Nuclear Stopping Power
3.3.3 Electronic Stopping Process
3.3.4 Thermal Lattice Vibration
3.3.5 Material Damage - De-channeling

Previous: 3.2 Point Response Interface Up: 3. Simulation - Theory Next: 3.3.1 Energy Loss Mechanisms

A. Hoessiger: Simulation of Ion Implantation for ULSI Technology