« PreviousUpNext »Contents
Previous: 9.2 Variation of the transconductance with the interface state density    Top: Home    Next: Bibliography

Hardware

The following table contains information about the different hardware used in this PhD thesis.

Wafer ID \( t_\mathrm {OX} \) Oxide Poly Type Process Comment
SM5P/30/H1 30\( \,\mathrm {nm} \) SiO\( _\mathrm {2} \) n\( ^\mathrm {++} \) PMOS SNIT/PM high H
SM5N/30/H1 30\( \,\mathrm {nm} \) SiO\( _\mathrm {2} \) n\( ^\mathrm {++} \) NMOS SNIT/PM high H
SM5P/30/H2 30\( \,\mathrm {nm} \) SiO\( _\mathrm {2} \) n\( ^\mathrm {++} \) PMOS Standard med H
SM5P/30/H3 30\( \,\mathrm {nm} \) SiO\( _\mathrm {2} \) n\( ^\mathrm {++} \) PMOS Metal 1 low H
SM6P/30/STD1 30\( \,\mathrm {nm} \) SiO\( _\mathrm {2} \) n\( ^\mathrm {++} \) PMOS Standard med H
SM6P/30/STD2 30\( \,\mathrm {nm} \) SiO\( _\mathrm {2} \) n\( ^\mathrm {++} \) PMOS Standard med H
SM6P/30/H1 30\( \,\mathrm {nm} \) SiO\( _\mathrm {2} \) n\( ^\mathrm {++} \) PMOS thin Ti/PM1 high H
SM6P/30/H2 30\( \,\mathrm {nm} \) SiO\( _\mathrm {2} \) n\( ^\mathrm {++} \) PMOS thin Ti/PM2 high H
SM6P/30/H3 30\( \,\mathrm {nm} \) SiO\( _\mathrm {2} \) n\( ^\mathrm {++} \) PMOS thick Ti/PM1 low H
HK2P/1.5/1 1.5\( \,\mathrm {nm} \) high–\( \kappa \) p\( ^\mathrm {++} \) PMOS imec wafer
« PreviousUpNext »Contents
Previous: 9.2 Variation of the transconductance with the interface state density    Top: Home    Next: Bibliography