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Silicon Compatible Emerging Materials, Processes, and Technologies for Advanced CMOS and Post-CMOS Applications 13 & Advanced CMOS-Compatible Semiconductor Devices 20

 

  • Authors: Hemanth Jagannathaan, João Martino, Zia Karim, Kuniyki Kakushima, Paul J. Timans, Evgeni Gousev, Stefan DeGendt, Durga Misra, Yaw Obeng, Fred Roozebom, Bich-Yen Nguyen, Jean-Pierre Raskin, Francisco Gámiz, Siegfried Selberherr, Eddy Simoen, Hiromu Ishii

Abstract:

This issue of ECS Transactions consists of up-to-date articles on materials, technology, and physics contributing to Silicon Compatible Emerging Materials, Processes, and Technologies for Advanced CMOS and Post-CMOS Applications, and also on Advanced CMOS-Compatible Semiconductor Devices.