We are active in the Bachelor's program of Electrical Engineering and Information Technology (Programming in C 1 & ‍2) as well as in the Master's program Microelectronics and Photonics (Quantum Electronics, Modeling Electronic Devices) as well as Computational Science and Engineering. Also have a look at our elective courses and open Bachelor's and Master's theses.


We actively support scientific conferences and communities in our field and maintain the following portal sites:

Annual Reviews

Our research activities cover a broad range from process to device, interconnect, transport, and reliability modeling, as well as characterization. Have a look at our recent annual reviews:

Annual Review 2023

Annual Review 2022

Annual Review 2021


We release our software using either open source channels or in collaboration with commercial partners (Minimos-NT, VSP,Simon). Even the legendary Minimos is still available. A full list of our software tools is available here.


We regularly publish our scientific results in books, journals, and at conferences. Also check out our 100+ PhD theses which are available online. Some selected overview papers can be found here.

Join Us

We are actively looking for scientific collaborators, either from academia, research labs or industry. We also frequently have openings for Master's or PhD theses, as well as PostDoc positions, see here.

Latest News

Lukas Cvitkovich will defend his thesis on June 28th.

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Congratulations to Johannes for successfully defending his dissertation

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Congratulations to Paul for successfully defending his dissertation

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Prof. Mark Kushner will give a talk at IuE on April 18th, at 2PM on "Model Based Approaches to Optimizing High Aspect Ratio Plasma Etching"

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