Luiz Felipe Aguinsky, MSc
Time:Tuesday, December 20th, 2022, 14:00
Place:Videoconference
Title:Phenomenological Modeling of Reactive Single-Particle Transport in Semiconductor Processing
Doctoral Dissertation Committee:
Committee Chair:
- Assoc. Prof. Dr. Johann Auer (TU Wien, Austria)
Supervisor and Examiner:
- Assoc. Prof. Dr. Josef Weinbub / E 360 (TU Wien, Austria)
Examiner:
- Univ. Prof. Dr. Ulrich Schmid (TU Wien, Austria)
- Prof. Mark Law, PhD (University of Florida, USA)