Advanced Developments for 0.25µm CMOS Technologies

The objectives of the ADEQUAT project were
(1) to develop basic process steps and process modules for the next two CMOS generations (0.35µm and 0.25µm) for logic applications;
(2) to demonstrate the feasibility of process modules, and to optimize their characteristics in CMOS process batches;
(3) to transfer the process know-how to industrial pilot lines.