Heinrich Kirchauer
Dipl.-Ing. Dr.techn.
Tel.Nr.: +43 1 58801-360


Worked for the IµE from 30-11-1994 to 29-04-1998.

Biography (as of 29-04-1998):
Heinrich Kirchauer was born in Vienna, Austria, in 1969. He studied communications engineering at the Technische Universität Wien, where he received the degree of Diplomingenieur in March 1994. After his studies he worked on a research project about statistical signal processing at the Institute for Communications Engineering for six months. In December 1994 he joined the Institute for Microelectronics. His scientific interests include three-dimensional process simulation with special emphasis on lithography simulation.