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Publications Wolfgang Pyka

21 records

Publications in Scientific Journals

7.  C. Heitzinger, W. Pyka, N. Tamaoki, T. Takase, T. Ohmine, S. Selberherr:
"Simulation of Arsenic In Situ Doping With Polysilicon CVD and Its Application to High Aspect Ratio Trenches";
IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 22 (2003), 3; 285 - 292. https://doi.org/10.1109/TCAD.2002.807879

6.  H. Puchner, R. Castagnetti, W. Pyka:
"Minimizing Thick Resist Sidewall Slope Dependence on Design Geometry by Optimizing Bake Conditions";
Microelectronic Engineering, 53 (2000), 429 - 432.

5.  W. Pyka, R. Martins, S. Selberherr:
"Optimized Algorithms for Three-Dimensional Cellular Topography Simulation";
IEEE Journal of Technology Computer Aided Design, 1 (2000), 20; 1 - 36. https://doi.org/10.1109/TCAD.1996.6449177

4.  W. Pyka, H. Kirchauer, S. Selberherr:
"Three-Dimensional Resist Development Simulation - Benchmarks and Integration with Lithography";
Microelectronic Engineering, 53 (2000), 1-4; 449 - 452. https://doi.org/10.1016/S0167-9317(00)00353-1

3.  P. Fleischmann, W. Pyka, S. Selberherr:
"Mesh Generation for Application in Technology CAD";
IEICE Transactions on Electronics (invited), E82-C (1999), 6; 937 - 947.

2.  W. Pyka, P. Fleischmann, B. Haindl, S. Selberherr:
"Three-Dimensional Simulation of HPCVD - Linking Continuum Transport and Reaction Kinetics with Topography Simulation";
IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 18 (1999), 12; 1741 - 1749. https://doi.org/10.1109/43.811323

1.  R. Martins, W. Pyka, R. Sabelka, S. Selberherr:
"High-Precision Interconnect Analysis";
IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 17 (1998), 11; 1148 - 1159. https://doi.org/10.1109/43.736187

Talks and Poster Presentations (with Proceedings-Entry)

11.  A. Hössinger, T. Binder, W. Pyka, S. Selberherr:
"Advanced Hybrid Cellular Based Approach for Three-Dimensional Etching and Deposition Simulation";
Poster: International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Athens, Greece; 2001-09-05 - 2001-09-07; in: "Proceedings of the International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)", (2001), ISBN: 3-211-83708-6; 424 - 427. https://doi.org/10.1007/978-3-7091-6244-6_98

10.  W. Pyka, C. Heitzinger, N. Tamaoki, T. Takase, T. Ohmine, S. Selberherr:
"Monitoring Arsenic In-Situ Doping with Advanced Models for Poly-Silicon CVD";
Talk: International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Athens, Greece; 2001-09-05 - 2001-09-07; in: "Proceedings of the International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)", (2001), ISBN: 3-211-83708-6; 124 - 127. https://doi.org/10.1007/978-3-7091-6244-6_27

9.  W. Pyka, S. Selberherr, V. Sukharev:
"Incorporation of Equipment Simulation into Integrated Feature Scale Profile Evolution";
Talk: European Solid-State Device Research Conference (ESSDERC), Cork; 2000-09-11 - 2000-09-13; in: "Proceedings of the European Solid-State Device Research Conference (ESSDERC)", (2000), ISBN: 2-86332-248-6; 180 - 183.

8.  W. Pyka, V. Sukharev, K. Kumar, S. Joh, J.E. McInerney:
"A 3D Integrated Simulation of Across-Wafer Metal Stack Gap-Fill for Local Interconnect Applications";
Poster: International VLSI Multilevel Interconnection Conference (VMIC), Santa Clara; 1999-09-07 - 1999-09-09; in: "Proceedings of the 16th Intl. VLSI Multilevel Interconnection Conf.", (1999), 477 - 479.

7.  W. Pyka, P. Fleischmann, B. Haindl, S. Selberherr:
"Linking Three-Dimensional Topography Simulation with High Pressure CVD Reaction Kinetics";
Talk: International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Kyoto, Japan; 1999-09-06 - 1999-09-08; in: "Proceedings of the International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)", (1999), ISBN: 4-930813-98-0; 199 - 202. https://doi.org/10.1109/SISPAD.1999.799295

6.  W. Pyka, H. Kirchauer, S. Selberherr:
"Three-Dimensional Resist Development Simulation - Benchmarks and Integration with Lithography";
Talk: Micro- and Nano-Engineering Conference, Rom; 1999-09-21 - 1999-09-23; in: "Abstracts Micro-and-Nano-Engineering 99 Conf.", (1999), 305 - 306.

5.  W. Pyka, R. Martins, S. Selberherr:
"Efficient Algorithms for Three-Dimensional Etching and Deposition Simulation";
Talk: International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Leuven, Belgium; 1998-09-02 - 1998-09-04; in: "Proceedings of the International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)", (1998), ISBN: 3-211-83208-4; 16 - 19. https://doi.org/10.1007/978-3-7091-6827-1_5

4.  R. Martins, W. Pyka, R. Sabelka, S. Selberherr:
"Modeling Integrated Circuit Interconnections";
Talk: International Conference on Microelectronics and Packaging, Curitiba; 1998-08-10 - 1998-08-14; in: "Proceedings XIII SBMicro, Intl. Conf. on Microelectronics and Packaging", (1998), 144 - 151.

3.  R. Martins, R. Sabelka, W. Pyka, S. Selberherr:
"Rigorous Capacitance Simulation of DRAM Cells";
Talk: International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Leuven, Belgium; 1998-09-02 - 1998-09-04; in: "Proceedings of the International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)", (1998), ISBN: 3-211-83208-4; 69 - 72. https://doi.org/10.1007/978-3-7091-6827-1_20

2.  W. Pyka, S. Selberherr:
"Three-Dimensional Simulation of Bulge Formation in Contact Hole Metalization";
Poster: International Conference on Modeling and Simulation of Microsystems (MSM), Santa Clara; 1998-05-06 - 1998-05-08; in: "Proceedings Intl. Conf. on Modeling and Simulation of Microsystems", (1998), ISBN: 0-9666135-0-3; T4.3.3.

1.  W. Pyka, S. Selberherr:
"Three-Dimensional Simulation of TiN Magnetron Sputter Deposition";
Talk: European Solid-State Device Research Conference (ESSDERC), Bordeaux; 1998-09-07 - 1998-09-09; in: "Proceedings of the European Solid-State Device Research Conference (ESSDERC)", (1998), ISBN: 2-86332-234-6; 324 - 327.

Doctor's Theses (authored and supervised)

Scientific Reports

2.   Grasser, T., Hössinger, A., Kosik, R., Mlekus, R., Pyka, W., Stockinger, M., Selberherr, S. (1999).
VISTA Status Report December 1999.
(reposiTUm)

1.  K. Dragosits, T. Grasser, H. Kosina, R. Mlekus, W. Pyka, S. Selberherr:
"VISTA Status Report June 1998";
1998; 19 pages.