Due to the rapid progress of Si technology and the introduction of new device
types and materials, it is a challenging task to develop and improve models for
TCAD device simulation. During this development process it is important to
compare the results of TCAD simulations to those obtained by more fundamental
methods. Here the Monte Carlo approach, in which the movement of electrons and
holes within a device is sampled over a simulation time period, proves to be
very successful. There are two approaches to represent the band
structure of a material in a Monte Carlo simulator: namely, analytical
expressions, such as the parabolic or non-parabolic approximations, or a fullband
structure. In the latter case the band structure is calculated for a
representable part of the first Brillouin zone — the so-called irreducible
wedge — and then passed to the Monte Carlo simulator in the form of a
three-dimensional mesh. Especially fullband Monte Carlo proved to be the tool
of choice to obtain material properties under arbitrary stress/strain
conditions, because the variations of the band structure are treated in a rather
fundamental way and are accurately reproduced even for high-strain
conditions. Apart from simulations in the field of strain engineering — which
is a key feature for actual MOSFET device design — fullband Monte Carlo is
generally applicable for hot carrier problems, because an accurate representation
of the band structure at higher energies is essential here. In contrast to hot
electrons, cold electrons are located in a small area around the valley minima
most of the time. To obtain accurate results in the combined low-temperature -
low-field regime, a refined unstructured mesh with high resolution
around the valley minima is used. With the refined mesh we are able to simulate devices which
operate below 10K, such as blocked impurity band photo detectors used for space
observation.
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