Erasmus Langer
Siegfried Selberherr
Oskar Baumgartner
Hajdin Ceric
Johann Cervenka
Siddhartha Dhar
Robert Entner
Otmar Ertl
Wolfgang Gös
Klaus-Tibor Grasser
Philipp Hehenberger
René Heinzl
Clemens Heitzinger
Andreas Hössinger
Gerhard Karlowatz
Markus Karner
Hans Kosina
Ling Li
Gregor Meller
Goran Milovanovic
Mihail Nedjalkov
Alexandre Nentchev
Roberto Orio
Vassil Palankovski
Mahdi Pourfath
Philipp Schwaha
Viktor Sverdlov
Oliver Triebl
Stephan Enzo Ungersböck
Martin-Thomas Vasicek
Stanislav Vitanov
Martin Wagner
Paul-Jürgen Wagner
Thomas Windbacher
Robert Wittmann

Goran Milovanovic
Dipl.-Ing.
milovanovic(!at)iue.tuwien.ac.at
Biography:
Goran Milovanovic was born in Tulln, Austria, in 1981. He studied physics at the Technische Universität Wien, where he received the degree of Diplomingenieur in November 2005. He joined the Institute for Microelectronics in April 2007, where he is currently working on his doctoral degree. His research interests include device modeling and simulation of strained Si CMOS transistors.

Effects of Stressed Silicon on Mobility

Stressed silicon offers larger electron and hole mobilities. Stress causes a deviation of the silicon lattice constant from its equilibrium value, modifying the electronic band structure. Strained silicon material has emerged as a strong contender for developing transistors for next-generation electronics, because this material system offers superior transport properties. To enable the design of new device structures based on strained-Si, a reliable set of models for parameters such as mobility, energy bandgap, and relaxation times is required. The models describe the mobility tensor for electrons in strained-Si layers as a function of strain, and they include the effect of strain-induced splitting of the conduction band valleys in Si, intervalley scattering, and doping dependence. Monte Carlo simulations are needed in order to validate the model, and the results are fit to experimental data. The change of the electron effective mass cannot be neglected for general stress conditions, and the strain-induced splitting of the conduction bands can be used to optimize the electron mobility. The model includes the variation of the effective masses with stress as well as the effect of reduction of intervalley scattering due to valley splitting, and doping- and temperature-dependence.


Comparison of parallel, perpendicular, and out-of-plane electron mobility components.


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