Phenomenological Single-Particle
Modeling of Reactive Transport
in Semiconductor Processing
2.2 Langmuir Adsorption Kinetics
The process of etching or deposition involves physical and chemical transformations of the evolving surface. Thus, a crucial element in the overall simulation approach is the choice of an adequate model for the interaction of the particles with the surface. Additionally, such a reactive transport model must be connected with a velocity field, as discussed in Section 2.1. In the context of phenomenological modeling, said model should be as simple as possible to capture the relevant physical and chemical processes, therefore, coarse approximations are permitted as long as the simulation outcomes can be related to experiments.
The established approach for phenomenological modeling of surfaces builds upon the seminal work by Irving Langmuir in 1918 [68]. The key idea behind Langmuir adsorption kinetics is that impinging vapor species adsorb
upon interacting with the force fields stemming from the surface atoms. Importantly, such force fields are not explicitly investigated, instead their properties are only phenomenologically described regarding general and
approximate properties of the reactant-surface system. These forces are assumed to be very short in range, thus the impinging reactants adsorb forming a film with at most one monolayer. If such forces are relatively weak, the
reactant can thermally evaporate spontaneously, leading to a reversible kinetic behavior.
This comparatively weak and reversible interaction is named physisorption (or physical adsorption), in contrast to chemisorption where the chemical bonds change more permanently [69]. Due to large
unknowns present in phenomenological modeling, the limit between physisorption and chemisorption is often tenuous, however, insights from Langmuir modeling are usually associated with the physisorption regime.
Langmuir adsorption kinetics starts by assuming that the surface has a homogeneous distribution of surface sites with area
There are two intrinsically empirical parameters in Eq. (2.3):
Finally, this surface kinetics relationship brings additional insight into the reactive transport calculation. Already from early experiments from Knudsen [72, 73] and Langmuir [74], it has been observed that the molecules which do not adsorb are reflected, however, they do not scatter away specularly. Instead, they follow a cosine distribution, that is, their reflection direction is independent of the incoming path. This observation is interpreted as evidence of a very fast mechanism such that during the reflection process the molecule thermalizes with the surface and loses information about its previous state. In semiconductor processing, this cosine dependence usually holds for uncharged reactants, while accelerated ions show specular reflections [75].
The Langmuir adsorption kinetics shown in Eq. (2.3) is valid for a single particle. Due to its phenomenological nature, such model can be employed regardless if the particle represents a well-defined chemical species or a phenomenological aggregate of multiple reactants. This dissertation focuses on semiconductor processing steps which can be effectively modeled using a single-particle. Nonetheless, it is notable that the semiconductor process modeling community has developed and applied multiple-particle variants of such models [43, 76, 77, 78]. La Magna et al. [43] propose, e.g., a steady-state, first-order reversible Langmuir kinetics for the competing adsorption of neutrals and polymers under ion bombardment for reactive ion etching (RIE).
Regardless of the number of involved chemical species, as discussed in Section 2.1 and Eq. (2.2), the final goal of describing the
surface state is the determination of a velocity field