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Publications Paul Manstetten

33 records


Books and Editorships

1. J. Weinbub, P. Manstetten, S.M. Goodnick:
"Book of Abstracts of the Workshop on High Performance TCAD";
Institute for Microelectronics, TU Wien, Wien, (2019), 28 page(s) . BibTeX

Publications in Scientific Journals

6. C. Lenz, P. Manstetten, L.F. Aguinsky, F. Rodrigues, A. Hössinger, J. Weinbub:
"Automatic Grid Refinement for Thin Material Layer Etching in Process TCAD Simulations";
Solid-State Electronics, 200, (invited) (2022), doi:10.1016/j.sse.2022.108534. BibTeX
5. L.F. Aguinsky, G. Wachter, P. Manstetten, F. Rodrigues, M. Trupke, U. Schmid, A. Hössinger, J. Weinbub:
"Modeling and Analysis of Sulfur Hexafluoride Plasma Etching for Silicon Microcavity Resonators";
Journal of Micromechanics and Microengineering, 31, (2021), 125003-1 - 125003-9 doi:10.1088/1361-6439/ac2bad. BibTeX
4. A. Toifl, M. Quell, X. Klemenschits, P. Manstetten, A. Hössinger, S. Selberherr, J. Weinbub:
"The Level-Set Method for Multi-Material Wet Etching and Non-Planar Selective Epitaxy";
IEEE Access, 8, (2020), 115406 - 115422 doi:10.1109/ACCESS.2020.3004136. BibTeX
3. L. Gnam, P. Manstetten, A. Hössinger, S. Selberherr, J. Weinbub:
"Accelerating Flux Calculations Using Sparse Sampling";
Micromachines, 9, (invited) (2018), 1 - 17 doi:10.3390/mi9110550. BibTeX
2. P. Manstetten, L. Filipovic, A. Hössinger, J. Weinbub, S. Selberherr:
"Framework to Model Neutral Particle Flux in Convex High Aspect Ratio Structures using One-Dimensional Radiosity";
Solid-State Electronics, 128, (invited) (2017), 141 - 147 doi:10.1016/j.sse.2016.10.029. BibTeX
1. P. Manstetten, J. Weinbub, A. Hössinger, S. Selberherr:
"Using Temporary Explicit Meshes for Direct Flux Calculation on Implicit Surfaces";
Procedia Computer Science, 108, (2017), 245 - 254 doi:10.1016/j.procs.2017.05.067. BibTeX

Contributions to Books

5. C. Lenz, A. Scharinger, P. Manstetten, A. Hössinger, J. Weinbub:
"A Novel Surface Mesh Simplification Method for Flux-Dependent Topography Simulations of Semiconductor Fabrication Processes";
in "Scientific Computing in Electrical Engineering", M. van Beurden, N. Budko, W. Schilders (ed); Springer, 2021, ISBN: 978-3-030-84238-3, 73 - 81 doi:10.1007/978-3-030-84238-3_8. BibTeX
4. M. Quell, P. Manstetten, A. Hössinger, S. Selberherr, J. Weinbub:
"Parallelized Construction of Extension Velocities for the Level-Set Method";
in "Parallel Processing and Applied Mathematics, Lecture Notes in Computer Science", 12043, R. Wyrzykowski, E. Deelman, J. Dongarra, K. Karczewski (ed); Springer International Publishing, 2020, ISBN: 978-3-030-43229-4, 348 - 358 doi:10.1007/978-3-030-43229-4_30. BibTeX
3. L. Gnam, P. Manstetten, A. Hössinger, S. Selberherr, J. Weinbub:
"Accelerating Flux Calculations Using Sparse Sampling";
in "Miniaturized Transistors", L. Filipovic, T. Grasser (ed); MDPI, (invited) 2019, ISBN: 978-3-03921-010-7, 176 - 192 doi:10.3390/books978-3-03921-011-4. BibTeX
2. P. Manstetten, L. Gnam, A. Hössinger, S. Selberherr, J. Weinbub:
"Sparse Surface Speed Evaluation on a Dynamic Three-Dimensional Surface Using an Iterative Partitioning Scheme";
in "Computational Science - ICCS 2018, Lecture Notes in Computer Science", 10860, Y. Shi, H. Fu, Y. Tian, V. Krzhizhanovskaya, M. Lees, J. Dongarra, P. Sloot (ed); Springer International Publishing, 2018, ISBN: 978-3-319-93698-7, 694 - 707 doi:10.1007/978-3-319-93698-7_53. BibTeX
1. P. Manstetten, L. Filipovic, A. Hössinger, J. Weinbub, S. Selberherr:
"Using One-Dimensional Radiosity to Model Neutral Particle Flux in High Aspect Ratio Holes";
in "Proceedings of the 2016 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS)", V. Sverdlov, S. Selberherr (ed); IEEE, 2016, ISBN: 978-1-4673-8608-1, 120 - 123 doi:10.1109/ULIS.2016.7440067. BibTeX

Talks and Poster Presentations (with Proceedings-Entry)

18. C. Lenz, P. Manstetten, A. Hössinger, J. Weinbub:
"Automatic Grid Refinement for Thin Material Layer Etching in Process TCAD Simulations";
Talk: International Conference on Simulation of Semiconductor Processes and Devices (SISPAD 2022), Granada, Spain; 2022-09-06 - 2022-09-08; in "SISPAD 2022: International Conference on Simulation of Semiconductor Processes and Devices - Conference Abstract Booklet", (2022), 11 - 12. BibTeX
17. C. Lenz, A. Scharinger, M. Quell, P. Manstetten, A. Hössinger, J. Weinbub:
"Evaluating Parallel Feature Detection Methods for Implicit Surfaces";
Talk: Austrian-Slovenian HPC Meeting (ASHPC), Maribor, Slovenia (Virtual); 2021-05-31 - 2021-06-02; in "Book of Abstracts of the Austrian-Slovenian HPC Meeting (ASHPC)", (2021), 31. BibTeX
16. A. Scharinger, P. Manstetten, A. Hössinger, J. Weinbub:
"Generative Model Based Adaptive Importance Sampling for Flux Calculations in Process TCAD";
Talk: International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Kobe, Japan - virtual; 2020-09-23 - 2020-10-06; in "Proceedings of the International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)", (2020), 39 - 42 doi:10.23919/SISPAD49475.2020.9241615. BibTeX
15. M. Quell, P. Manstetten, A. Hössinger, S. Selberherr, J. Weinbub:
"Parallelized Construction of Extension Velocities for the Level-Set Method";
Talk: International Conference on Parallel Processing and Applied Mathematics (PPAM), Bialystok, Poland; 2019-09-08 - 2019-09-11; in "Proceedings of the International Conference on Parallel Processing and Applied Mathematics (PPAM)", (2019), 42. BibTeX
14. X. Klemenschits, P. Manstetten, L. Filipovic, S. Selberherr:
"Process Simulation in the Browser: Porting ViennaTS using WebAssembly";
Talk: International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Udine, Italy; 2019-09-04 - 2019-09-06; in "Proceedings of the International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)", (2019), ISBN: 978-1-7281-0938-1, 339 - 342 doi:10.1109/SISPAD.2019.8870374. BibTeX
13. L.F. Aguinsky, P. Manstetten, A. Hössinger, S. Selberherr, J. Weinbub:
"An Extended Knudsen Diffusion Model for Aspect Ratio Dependent Atomic Layer Etching";
Talk: International Workshop on Atomic Layer Etching (ALE), Bellevue, WA, USA; 2019-07-21 - 2019-07-24; in "Abstracts of the International Conference on Atomic Layer Deposition (ALD) Featuring the International Workshop on Atomic Layer Etching (ALE)", (2019), 109. BibTeX
12. L. Gnam, P. Manstetten, M. Quell, K. Rupp, S. Selberherr, J. Weinbub:
"A Flexible Shared-Memory Parallel Mesh Adaptation Framework";
Talk: International Conference on Computational Science and Its Applications (ICCSA), Saint Petersburg , Russia; 2019-07-01 - 2019-07-04; in "Proceedings of the International Conference on Computational Science and Its Applications (ICCSA)", (2019), ISBN: 978-1-7281-2847-4, 158 - 165 doi:10.1109/ICCSA.2019.00016. BibTeX
11. L.F. Aguinsky, P. Manstetten, A. Hössinger, S. Selberherr, J. Weinbub:
"Three-Dimensional TCAD for Atomic Layer Processing";
Talk: Workshop on High Performance TCAD (WHPTCAD), Chicago, IL, USA; 2019-05-24 - 2019-05-25; in "Book of Abstracts of the Workshop on High Performance TCAD (WHPTCAD)", (2019), 5. BibTeX
10. A. Hössinger, P. Manstetten, G. Diamantopoulos, M. Quell, J. Weinbub:
"High Performance Computing Aspects in Semiconductor Process Simulation";
Talk: Workshop on High Performance TCAD (WHPTCAD), Chicago, IL, USA; (invited) 2019-05-24 - 2019-05-25; in "Book of Abstracts of the Workshop on High Performance TCAD (WHPTCAD)", (2019), 3 - 4. BibTeX
9. P. Manstetten, L.F. Aguinsky, S. Selberherr, J. Weinbub:
"High-Performance Ray Tracing for Nonimaging Applications";
Talk: Workshop on High Performance TCAD (WHPTCAD), Chicago, IL, USA; 2019-05-24 - 2019-05-25; in "Book of Abstracts of the Workshop on High Performance TCAD (WHPTCAD)", (2019), 20. BibTeX
8. P. Manstetten, G. Diamantopoulos, L. Gnam, L.F. Aguinsky, M. Quell, A. Toifl, A. Scharinger, A. Hössinger, M. Ballicchia, M. Nedjalkov, J. Weinbub:
"High Performance TCAD: From Simulating Fabrication Processes to Wigner Quantum Transport";
Talk: Workshop on High Performance TCAD (WHPTCAD), Chicago, IL, USA; 2019-05-24 - 2019-05-25; in "Book of Abstracts of the Workshop on High Performance TCAD (WHPTCAD)", (2019), 13. BibTeX
7. L.F. Aguinsky, P. Manstetten, A. Hössinger, S. Selberherr, J. Weinbub:
"A Mathematical Extension to Knudsen Diffusion Including Direct Flux and Accurate Geometric Description";
Poster: International Workshop on Computational Nanotechnology (IWCN), Chicago, IL, USA; 2019-05-20 - 2019-05-24; in "Book of Abstracts of the International Workshop on Computational Nanotechnology (IWCN)", (2019), ISBN: 978-3-9504738-0-3, 109 - 110. BibTeX
6. G. Diamantopoulos, P. Manstetten, L. Gnam, V. Simonka, L.F. Aguinsky, M. Quell, A. Toifl, A. Hössinger, J. Weinbub:
"Recent Advances in High Performance Process TCAD";
Talk: SIAM Conference on Computational Science and Engineering, Spokane, WA, USA; 2019-02-25 - 2019-03-01; in "CSE19 Abstracts", (2019), 335. BibTeX
5. L. Gnam, P. Manstetten, S. Selberherr, J. Weinbub:
"Comparison of High-Performance Graph Coloring Algorithms";
Talk: Vienna Young Scientists Symposium (VSS), Vienna, Austria; 2018-06-07 - 2018-06-08; in "Proceedings of the Vienna Young Scientists Symposium", (2018), ISBN: 978-3-9504017-8-3, 30 - 31. BibTeX
4. P. Manstetten, A. Hössinger, J. Weinbub, S. Selberherr:
"Accelerated Direct Flux Calculations Using an Adaptively Refined Icosahedron";
Talk: International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Kamakura, Japan; 2017-09-07 - 2017-09-09; in "Proceedings of the International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)", (2017), ISBN: 978-4-86348-612-6, 73 - 76 doi:10.23919/SISPAD.2017.8085267. BibTeX
3. P. Manstetten, V. Simonka, G. Diamantopoulos, L. Gnam, A. Makarov, A. Hössinger, J. Weinbub:
"Computational and Numerical Challenges in Semiconductor Process Simulation";
Talk: SIAM Conference on Computational Science and Engineering, Atlanta, GA, USA; 2017-02-27 - 2017-03-03; in "CSE17 Abstracts", (2017), 46. BibTeX
2. P. Manstetten, L. Filipovic, A. Hössinger, J. Weinbub, S. Selberherr:
"Using One-Dimensional Radiosity to Model Neutral Flux in Convex High Aspect Ratio Structures";
Poster: International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Nürnberg, Deutschland; 2016-09-06 - 2016-09-08; in "Proceedings of the International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)", (2016), ISBN: 978-1-5090-0817-9, 265 - 268 doi:10.1109/SISPAD.2016.7605198. BibTeX
1. P. Manstetten, L. Filipovic, A. Hössinger, J. Weinbub, S. Selberherr:
"Modeling Neutral Particle Flux in High Aspect Ratio Holes using a One-Dimensional Radiosity Approach";
Talk: Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS), Wien; 2016-01-25 - 2016-01-27; in "Book of Abstracts of the Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS)", (2016), ISBN: 978-3-901578-29-8, 68 - 69. BibTeX

Talks and Poster Presentations (without Proceedings-Entry)

2. P. Manstetten:
"Performance Improvements For Advanced Physical Etching And Deposition In Memory Technologies";
Talk: Silvaco Users Global Event (SURGE), Santa Clara, CA, USA; (invited) 2018-10-09. BibTeX
1. B. Ullmann, A. Grill, P. Manstetten, M. Jech, M. Kampl, W. H. Zisser, L. Filipovic, M. Thesberg, F. Rudolf, T. Windbacher, J. Cervenka, M. Katterbauer, J. Weinbub:
"Ihr Smartphone - ein Supercomputer vor 20 Jahren. Ein Einblick in die Mikro- und Nanoelektronik";
Talk: Lange Nacht der Forschung 2016, Wien; 2016-04-22. BibTeX

Doctor's Theses (authored and supervised)

1. P. Manstetten:
"Efficient Flux Calculations for Topography Simulation";
Reviewer: S. Selberherr, J. Weinbub, M. Wimmer, H. Köstler; Institut für Mikroelektronik, 2018, oral examination: 2018-06-28 doi:10.34726/hss.2018.57263. BibTeX
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Head: Univ. Prof. Dipl.-Ing. Dr. techn. Tibor Grasser
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